Silane Gas
Shin-Etsu high purity Silane gas are used for a wide range of applications, including electronics applications such as semiconductor insulation coating and epitaxial coating, optical fibers, and chemical applications such as fine ceramics. With high purity and stable supply supported by advanced refining technology, strict quality control, and container delivery management etc., Shin-Etsu has received a great deal of trust in meeting the diverse requirement of customers.
Application
Chemical
Semiconductor wafer
Optical fiber
Chemical
Properties
| Product | Chemical name | Molecular formula | Appearance | Density （g/cm3） |
Melting Point（°C） | Boiling Point（°C） |
|---|---|---|---|---|---|---|
| KA-03 | TrichloroSilane | SiHCl3 | Transparent liquid | 1.34(20°C） | －126.6 | 31.8 |
| KA-04 | Silicon tetrachloride | SiCl4 | Transparent liquid | 1.48(20°C） | －68.8 | 57.6 |
Packing
Semiconductor wafer
Properties
| Product | Chemical name | Molecular formula | Molecular weight | Appearance | Density(g/cm3) | Melting Point（°C） | Boiling Point（°C） |
|---|---|---|---|---|---|---|---|
| KAE-02 | DichloroSilane | SiH2Cl2 | 101.01 | ＊ | 1.22(7°C） | －122.0 | 8.2 |
| KAE-03D | TrichloroSilane | SiHCl3 | 135.45 | Transparent liquid | 1.34(20°C） | －126.6 | 31.8 |
*Colorless transparent inside the container (pressure 0.2 to 1.7 kg/cm2G), but colorless gas body under normal temperature and pressure.
Packing
Optical fiber
Properties
| Product | Chemical name | Molecular formula | Molecular weight | Appearance | Density(g/cm3) | Melting Point（°C） | Boiling Point（°C） |
|---|---|---|---|---|---|---|---|
| KAF-04 | Silicon tetrachloride | SiCl4 | 169.90 | Transparent liquid | 1.48(20°C） | -68.8 | 57.6 |
Packing Container
* The data of each product that exists in the above-mentioned table is not a standard value. Please test without fail before use beforehand, and confirm whether to suit use.