KA series

Shin-Etsu Chemical's high-purity silane gas are used wide range of applications for electronics applications such as most advanced logic semiconductor, insulation of memory devices and epitaxial thin films of analog devices, as well as fiber applications that are raw materials for optical fiber synthetic quartz, and modification agent of fuel-saving tire rubber of automobiles.
It is contributed to the achievement of SDGs with materials.
Shin-Etsu Chemical's high-purity silane gas are ultra-high purity materials by advanced refining technology and ultra-trace analysis technology, strict quality control backed by many years of Shin-Etsu Six Sigma activities, and thorough container clean management. By high quality and stability of impurities reduced to the utmost limit, it will be able to meet the diverse requirement and earn the trust from customers at all over the world.

Application

Chemical

Properties

Product	Chemical name	Molecular formula	Appearance	Density （g/cm3）	Melting Point（°C）	Boiling Point（°C）
KA-03	TrichloroSilane	SiHCl3	Transparent liquid	1.34(20°C）	－126.6	31.8
KA-04	Silicon tetrachloride	SiCl4	Transparent liquid	1.48(20°C）	－68.8	57.6

Packing

Semiconductor wafer

Properties

Product	Chemical name	Molecular formula	Molecular weight	Appearance	Density (g/cm3)	Melting Point（°C）	Boiling Point（°C）
KAE-02	DichloroSilane	SiH2Cl2	101.01	＊	1.22(7°C）	－122.0	8.2
KAE-03D	TrichloroSilane	SiHCl3	135.45	Transparent liquid	1.34(20°C）	－126.6	31.8

*Colorless transparent inside the container (pressure 0.2 to 1.7 kg/cm²G), but colorless gas body under normal temperature and pressure.

Packing

Optical fiber

Properties

Product	Chemical name	Molecular formula	Molecular weight	Appearance	Density (g/cm3)	Melting Point（°C）	Boiling Point（°C）
KAF-04	Silicon tetrachloride	SiCl4	169.90	Transparent liquid	1.48(20°C）	-68.8	57.6

Packing Container