High-purity silane gas
KA series
Shin-Etsu Chemical's high-purity silane gas are used wide range of applications for electronics applications such as most advanced logic semiconductor, insulation of memory devices and epitaxial thin films of analog devices, as well as fiber applications that are raw materials for optical fiber synthetic quartz, and modification agent of fuel-saving tire rubber of automobiles.
It is contributed to the achievement of SDGs with materials.
Shin-Etsu Chemical's high-purity silane gas are ultra-high purity materials by advanced refining technology and ultra-trace analysis technology, strict quality control backed by many years of Shin-Etsu Six Sigma activities, and thorough container clean management. By high quality and stability of impurities reduced to the utmost limit, it will be able to meet the diverse requirement and earn the trust from customers at all over the world.
Chemical
Properties
Product | Chemical name | Molecular formula | Appearance | Density (g/cm3) |
Melting Point(°C) | Boiling Point(°C) |
---|---|---|---|---|---|---|
KA-03 | TrichloroSilane | SiHCl3 | Transparent liquid | 1.34(20°C) | -126.6 | 31.8 |
KA-04 | Silicon tetrachloride | SiCl4 | Transparent liquid | 1.48(20°C) | -68.8 | 57.6 |
Packing

Semiconductor wafer
Properties
Product | Chemical name | Molecular formula | Molecular weight | Appearance | Density (g/cm3) |
Melting Point(°C) | Boiling Point(°C) |
---|---|---|---|---|---|---|---|
KAE-02 | DichloroSilane | SiH2Cl2 | 101.01 | * | 1.22(7°C) | -122.0 | 8.2 |
KAE-03D | TrichloroSilane | SiHCl3 | 135.45 | Transparent liquid | 1.34(20°C) | -126.6 | 31.8 |
*Colorless transparent inside the container (pressure 0.2 to 1.7 kg/cm2G), but colorless gas body under normal temperature and pressure.
Packing

Optical fiber
Properties
Product | Chemical name | Molecular formula | Molecular weight | Appearance | Density (g/cm3) |
Melting Point(°C) | Boiling Point(°C) |
---|---|---|---|---|---|---|---|
KAF-04 | Silicon tetrachloride | SiCl4 | 169.90 | Transparent liquid | 1.48(20°C) | -68.8 | 57.6 |
Packing Container

* The data of each product that exists in the above-mentioned table is not a standard value. Please test without fail before use beforehand, and confirm whether to suit use.