Shin-Etsu Chemical Co.,Ltd. Organic Electronics Materials Dept.

Silane Gas

Shin-Etsu high purity Silane gas are used for a wide range of applications, including electronics applications such as semiconductor insulation coating and epitaxial coating, optical fibers, and chemical applications such as fine ceramics. With high purity and stable supply supported by advanced refining technology, strict quality control, and container delivery management etc., Shin-Etsu has received a great deal of trust in meeting the diverse requirement of customers.

Application

Chemical

Chemical

Semiconductor wafer

Semiconductor wafer

Optical fiber

Optical fiber

Chemical

Properties

Product Chemical name Molecular formula Appearance Density
(g/cm3
Melting Point(°C) Boiling Point(°C)
KA-03 TrichloroSilane SiHCl3 Transparent liquid 1.34(20°C) -126.6 31.8
KA-04 Silicon tetrachloride SiCl4 Transparent liquid 1.48(20°C) -68.8 57.6

Packing

Semiconductor wafer

Properties

Product Chemical name Molecular formula Molecular weight Appearance Density(g/cm3) Melting Point(°C) Boiling Point(°C)
KAE-02 DichloroSilane SiH2Cl2 101.01 1.22(7°C) -122.0 8.2
KAE-03D TrichloroSilane SiHCl3 135.45 Transparent liquid 1.34(20°C) -126.6 31.8

*Colorless transparent inside the container (pressure 0.2 to 1.7 kg/cm2G), but colorless gas body under normal temperature and pressure.

Packing

Optical fiber

Properties

Product Chemical name Molecular formula Molecular weight Appearance Density(g/cm3) Melting Point(°C) Boiling Point(°C)
KAF-04 Silicon tetrachloride SiCl4 169.90 Transparent liquid 1.48(20°C) -68.8 57.6

Packing Container

* The data of each product that exists in the above-mentioned table is not a standard value. Please test without fail before use beforehand, and confirm whether to suit use.